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1.4705286.pdf | 3.25 MB | Adobe PDF | 見る/開く |
タイトル: | Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram |
著者: | Yamaji, M. Kawashima, H. Suzuki, J. Tanaka, S. Shimizu, M. https://orcid.org/0000-0002-9948-891X (unconfirmed) Hirao, K. Shimotsuma, Y. https://orcid.org/0000-0003-0588-3167 (unconfirmed) Miura, K. https://orcid.org/0000-0001-6199-7113 (unconfirmed) |
キーワード: | high-speed optical techniques holography laser materials processing microfabrication optical focusing transparency |
発行日: | 15-Apr-2012 |
出版者: | American Institute of Physics |
誌名: | JOURNAL OF APPLIED PHYSICS |
巻: | 111 |
号: | 8 |
論文番号: | 083107 |
抄録: | A new 3D microfabrication method has been developed, which uses only a single femtosecond laser pulse and a hologram. For the microfabrication inside transparent materials, the optical axial elongation of the fabricated structure is a major problem that has thus far limited design flexibility, especially for the direction along the optical axis. By controlling the light intensity distribution profile and using the adequate focal length of the hologram, this problem was solved and homogeneous and elongation-free 3D microfabrication was achieved. |
著作権等: | Copyright 2012 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in JOURNAL OF APPLIED PHYSICS 111, 083107 (2012) and may be found at http://link.aip.org/link/?jap/111/083107 |
URI: | http://hdl.handle.net/2433/160651 |
DOI(出版社版): | 10.1063/1.4705286 |
関連リンク: | http://link.aip.org/link/?jap/111/083107 |
出現コレクション: | 学術雑誌掲載論文等 |
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