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ファイル | 記述 | サイズ | フォーマット | |
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j.apsusc.2012.08.084.pdf | 345.68 kB | Adobe PDF | 見る/開く |
タイトル: | Femtosecond laser ablation of wide band-gap materials |
著者: | Takayama, Hidetoshi Maruyama, Toshiro |
著者名の別形: | 丸山, 敏朗 |
キーワード: | Femtosecond laser Laser ablation Wide band-gap material |
発行日: | 15-Nov-2012 |
出版者: | Elsevier B.V. |
誌名: | Applied Surface Science |
巻: | 261 |
開始ページ: | 705 |
終了ページ: | 707 |
抄録: | A plasma model proposed by Jiang and Tsai was applied to the experimental results for wide band-gap materials. The model fairly well predicted the laser-fluence dependences of the hole depth and diameter. The analytical threshold fluence represented the pulse-duration dependence very well. However, the model was insufficient to express the crater shape and to predict the threshold fluence. Deviations from the measurements suggest that the effect of ponderomotive force should be taken into account to improve the expression for the crater shape and that the surface energy needed to be additionally taken into account to predict the threshold fluence quantitatively. |
著作権等: | © 2012 Elsevier B.V. This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 |
URI: | http://hdl.handle.net/2433/162015 |
DOI(出版社版): | 10.1016/j.apsusc.2012.08.084 |
出現コレクション: | 学術雑誌掲載論文等 |
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