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タイトル: | Derivation of effective penetration depth of femtosecond laser pulses in metal from ablation rate dependence on laser fluence, incidence angle, and polarization |
著者: | Miyasaka, Yasuhiro Hashida, Masaki https://orcid.org/0000-0003-4834-0138 (unconfirmed) Nishii, Takaya Inoue, Shunsuke Sakabe, Shuji |
著者名の別形: | 阪部, 周二 |
発行日: | 5-Jan-2015 |
出版者: | American Institute of Physics |
誌名: | Applied Physics Letters |
巻: | 106 |
号: | 1 |
論文番号: | 013101 |
抄録: | Ablation rate dependence on laser fluence for copper subjected to oblique femtosecond laser irradiation has been determined experimentally in order to investigate processing induced by oblique irradiation. A difference of ablation rate between p-polarized and s-polarized oblique irradiation is clearly observed. Effective penetration depth is defined to explain the ablation rate dependence instead of using optical penetration depth, which is treated as a key value for determining the ablation rate in conventional theory. The effective penetration depth for copper is presented in simple formulas as a function of laser incidence angle for each polarization. |
著作権等: | © 2015 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. |
URI: | http://hdl.handle.net/2433/196777 |
DOI(出版社版): | 10.1063/1.4905353 |
出現コレクション: | 学術雑誌掲載論文等 |
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