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タイトル: | Sputtering of amorphous silicon nitride irradiated with energetic C60 ions: Preferential sputtering and synergy effect between electronic and collisional sputtering |
著者: | Kitayama, T. Morita, Y. Nakajima, K. Narumi, K. Saitoh, Y. Matsuda, M. Sataka, M. Toulemonde, M. Kimura, K. |
著者名の別形: | 木村, 健二 |
キーワード: | Sputtering C60 Amorphous silicon nitride |
発行日: | 15-Dec-2015 |
出版者: | Elsevier B.V. |
誌名: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
巻: | 365 |
開始ページ: | 490 |
終了ページ: | 495 |
抄録: | Amorphous silicon nitride films (thickness 30 nm) deposited on Si(001) were irradiated with 30–1080 keV C60 and 100 MeV Xe ions to fluences ranging from 2 x 10[11] to 1 x 10[14] ions/cm[2]. The composition depth profiles of the irradiated samples were measured using high-resolution Rutherford backscattering spectrometry. The sputtering yields were estimated from the derived composition profiles. Pronounced preferential sputtering of nitrogen was observed in the electronic energy loss regime. In addition, a large synergy effect between the electronic and collisional sputtering was also observed. The sputtering yields were calculated using the unified thermal spike model to understand the observed results. Although the calculated results reproduced the observed total sputtering yields with a lowered sublimation energy, the observed preferential sputtering of nitrogen could not be explained. The present results suggest an additional sputtering mechanism related to the electronic energy loss. |
著作権等: | © 2016. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ The full-text file will be made open to the public on 15 December 2017 in accordance with publisher's 'Terms and Conditions for Self-Archiving'. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 This is not the published version. Please cite only the published version. |
URI: | http://hdl.handle.net/2433/207607 |
DOI(出版社版): | 10.1016/j.nimb.2015.07.089 |
出現コレクション: | 学術雑誌掲載論文等 |
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