ダウンロード数: 345
このアイテムのファイル:
ファイル | 記述 | サイズ | フォーマット | |
---|---|---|---|---|
j.vacuum.2009.11.018.pdf | 597.91 kB | Adobe PDF | 見る/開く |
完全メタデータレコード
DCフィールド | 値 | 言語 |
---|---|---|
dc.contributor.author | Aoki, Takaaki | en |
dc.contributor.author | Seki, Toshio | en |
dc.contributor.author | Matsuo, Jiro | en |
dc.contributor.alternative | 青木, 学聡 | ja |
dc.date.accessioned | 2010-10-18T05:33:01Z | - |
dc.date.available | 2010-10-18T05:33:01Z | - |
dc.date.issued | 2010-03-24 | - |
dc.identifier.issn | 0042-207X | - |
dc.identifier.uri | http://hdl.handle.net/2433/128763 | - |
dc.description.abstract | Molecular dynamics (MD) simulations of large argon clusters impacting on silicon targets were performed. The characteristics of crater formation, a typical collisional effect with large cluster impact were examined from the viewpoint of incident energy, cluster size and incident angle. The MD simulation results suggested that the condition where an incident cluster penetrates into the solid target and causes a crater is mainly dominated by the incident energy-per-atom rather than total incident energy of the cluster. Additionally, the MD simulations of sequential multiple cluster impacts and grazing-angle cluster irradiation on irregular surface structures were studied to characterize the surface modification effects with large cluster ion beam process. | en |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | - |
dc.publisher | Elsevier Ltd | en |
dc.rights | © 2009 Elsevier Ltd | en |
dc.rights | この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 | ja |
dc.rights | This is not the published version. Please cite only the published version. | en |
dc.subject | Cluster ion beam | en |
dc.subject | Molecular dynamics simulation | en |
dc.subject | Crater formation | en |
dc.subject | Surface modification | en |
dc.title | Molecular dynamics simulations for gas cluster ion beam processes | en |
dc.type | journal article | - |
dc.type.niitype | Journal Article | - |
dc.identifier.ncid | AA00879589 | - |
dc.identifier.jtitle | Vacuum | en |
dc.identifier.volume | 84 | - |
dc.identifier.issue | 8 | - |
dc.identifier.spage | 994 | - |
dc.identifier.epage | 998 | - |
dc.relation.doi | 10.1016/j.vacuum.2009.11.018 | - |
dc.textversion | author | - |
dcterms.accessRights | open access | - |
出現コレクション: | 学術雑誌掲載論文等 |
このリポジトリに保管されているアイテムはすべて著作権により保護されています。