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dc.contributor.authorAoki, Takaakien
dc.contributor.authorSeki, Toshioen
dc.contributor.authorMatsuo, Jiroen
dc.contributor.alternative青木, 学聡ja
dc.date.accessioned2010-10-18T05:33:01Z-
dc.date.available2010-10-18T05:33:01Z-
dc.date.issued2010-03-24-
dc.identifier.issn0042-207X-
dc.identifier.urihttp://hdl.handle.net/2433/128763-
dc.description.abstractMolecular dynamics (MD) simulations of large argon clusters impacting on silicon targets were performed. The characteristics of crater formation, a typical collisional effect with large cluster impact were examined from the viewpoint of incident energy, cluster size and incident angle. The MD simulation results suggested that the condition where an incident cluster penetrates into the solid target and causes a crater is mainly dominated by the incident energy-per-atom rather than total incident energy of the cluster. Additionally, the MD simulations of sequential multiple cluster impacts and grazing-angle cluster irradiation on irregular surface structures were studied to characterize the surface modification effects with large cluster ion beam process.en
dc.format.mimetypeapplication/pdf-
dc.language.isoeng-
dc.publisherElsevier Ltden
dc.rights© 2009 Elsevier Ltden
dc.rightsこの論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。ja
dc.rightsThis is not the published version. Please cite only the published version.en
dc.subjectCluster ion beamen
dc.subjectMolecular dynamics simulationen
dc.subjectCrater formationen
dc.subjectSurface modificationen
dc.titleMolecular dynamics simulations for gas cluster ion beam processesen
dc.typejournal article-
dc.type.niitypeJournal Article-
dc.identifier.ncidAA00879589-
dc.identifier.jtitleVacuumen
dc.identifier.volume84-
dc.identifier.issue8-
dc.identifier.spage994-
dc.identifier.epage998-
dc.relation.doi10.1016/j.vacuum.2009.11.018-
dc.textversionauthor-
dcterms.accessRightsopen access-
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