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| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| 1.3264627.pdf | 558.59 kB | Adobe PDF | 見る/開く |
| タイトル: | Characteristics of liquid cluster ion beam for surface treatment |
| 著者: | Ryuto, H.  Ozaki, R. Kubo, Y. Takeuchi, M. Takaoka, G. H. |
| キーワード: | ion beam applications ion sources organic compounds surface treatment water |
| 発行日: | Feb-2010 |
| 出版者: | AMER INST PHYSICS |
| 誌名: | REVIEW OF SCIENTIFIC INSTRUMENTS |
| 巻: | 81 |
| 号: | 2 |
| 論文番号: | 02B902 |
| 抄録: | A liquid cluster ion source, which is an ion source for the cluster beams produced with liquid materials, has been developed for the surface treatment of solid materials. The electrodes were designed for increasing the cluster beam intensity by a computer simulation of beam trajectories. The peaks of the cluster size distributions of the water and ethanol cluster ion beams of 3 atm vapor pressure were approximately at 2.4×103 and 1.6×103 molecules, respectively. The cluster size distributions of ethanol clusters were not sensitive to the variations of the acceleration voltages (Ve) and currents (Ie) of the electrons for ionization when the Ve and Ie were larger than approximately 200 V and 200 mA, respectively. |
| 著作権等: | Copyright 2010 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in REVIEW OF SCIENTIFIC INSTRUMENTS81, 02B902 (2010) and may be found at |
| URI: | http://hdl.handle.net/2433/147203 |
| DOI(出版社版): | 10.1063/1.3264627 |
| PubMed ID: | 20192468 |
| 関連リンク: | http://link.aip.org/link/RSINAK/v81/i2/p02B902/s1 |
| 出現コレクション: | 学術雑誌掲載論文等 |
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