積層型圧電アクチュエータを用いた進行波型マイクロポンプによる流体輸送制御(<特集>第17回MAGDAコンファレンス)

Abstract

A micropump is one of the most important microfluidic components in Micro Total Analysis System (μTAS). We have developed a traveling wave micropump driven by piezoelectric bimorph cantilevers and have been applied to a biomaterial sensing system. In this paper, a valveless micropump driven by laminated piezoelectric actuators was fabricated to miniaturize the traveling wave micropump. By miniaturization of the pump size, multiple micropumps are integrated on one chip for fluid control in a microfluidic network. To confirm the validity of the pumping principle, the fluid controllability in a branch microchannel integrated with two micropumps was measured using Micro Particle Image Velocimetry (MicroPIV).