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タイトル: | Micromirror arrays to assess luminescent nano-objects. |
著者: | Kawakami, Yoichi https://orcid.org/0000-0003-3752-1507 (unconfirmed) Kanai, Akinobu Kaneta, Akio Funato, Mitsuru https://orcid.org/0000-0002-5455-3757 (unconfirmed) Kikuchi, Akihiko Kishino, Katsumi |
著者名の別形: | 川上, 養一 |
キーワード: | finite difference time-domain analysis focused ion beam technology gallium compounds III-V semiconductors indium compounds micromirrors photoluminescence ray tracing scanning electron microscopy wide band gap semiconductors |
発行日: | May-2011 |
出版者: | American Institute of Physics |
誌名: | The Review of scientific instruments |
巻: | 82 |
号: | 5 |
論文番号: | 053905 |
抄録: | We propose an array of submicrometer mirrors to assess luminescent nano-objects. Micromirror arrays (MMAs) are fabricated on Si (001) wafers via selectively doping Ga using the focused ion beam technique to form p-type etch stop regions, subsequent anisotropic chemical etching, and Al deposition. MMAs provide two benefits: reflection of luminescence from nano-objects within MMAs toward the Si (001) surface normal and nano-object labeling. The former increases the probability of optics collecting luminescence and is demonstrated by simulations based on the ray-tracing and finite-difference time-domain methods as well as by experiments. The latter enables different measurements to be repeatedly performed on a single nano-object located at a certain micromirror. For example, a single InGaN∕GaN nanocolumn is assessed by scanning electron microscopy and microphotoluminescence spectroscopy. |
著作権等: | © 2011 American Institute of Physics. |
URI: | http://hdl.handle.net/2433/160133 |
DOI(出版社版): | 10.1063/1.3589855 |
PubMed ID: | 21639516 |
出現コレクション: | 学術雑誌掲載論文等 |
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