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dc.contributor.authorYoshioka, Hironorien
dc.contributor.authorNakamura, Takashien
dc.contributor.authorKimoto, Tsunenobuen
dc.date.accessioned2014-06-13T02:39:49Z-
dc.date.available2014-06-13T02:39:49Z-
dc.date.issued2012-07-31-
dc.identifier.issn0021-8979-
dc.identifier.urihttp://hdl.handle.net/2433/187958-
dc.description.abstractFast states at SiO[2]/SiC interfacesannealed in NO at 1150–1350 °C have been investigated. The response frequency of the interface states was measured by the conductance method with a maximum frequency of 100 MHz. The interface state density was evaluated based on the difference between quasi-static and theoretical capacitances (C−ψ S method). Very fast states, which are not observed in as-oxidized samples, were generated by NO annealing, while states existing at an as-oxidized interface decreased by approximately 90%. The response frequency of the very fast states was higher than 1 MHz and increased when the energy level approaches the conduction band edge. For example, the response frequency (time) was 100 MHz (5 ns) at E [C]−E [T] = 0.4 eV and room temperature. The SiO[2]/SiC interfaceannealed in NO at 1250 °C showed the lowest interface state density, and NO annealing at a temperature higher than 1250 °C is not effective because of the increase in the very fast states.en
dc.format.mimetypeapplication/pdf-
dc.language.isoeng-
dc.publisherAIP Publishingen
dc.rights© 2012 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.en
dc.titleGeneration of very fast states by nitridation of the SiO[2]/SiC interfaceen
dc.typejournal article-
dc.type.niitypeJournal Article-
dc.identifier.ncidAA00693547-
dc.identifier.jtitleJournal of Applied Physicsen
dc.identifier.volume112-
dc.identifier.issue2-
dc.relation.doi10.1063/1.4740068-
dc.textversionpublisher-
dc.identifier.artnum024520-
dcterms.accessRightsopen access-
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