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タイトル: Fabrication of ZnSnP(2) thin films by phosphidation
著者: Nakatsuka, S.
Nose, Y.
Uda, T.
著者名の別形: 野瀬, 嘉太郎
キーワード: Chalcopyrite
Phosphidation
Sputtering
Surface morphology
Photovoltaics
Chemical potential diagram
発行日: Aug-2015
出版者: Elsevier B.V.
誌名: Thin Solid Films
巻: 589
開始ページ: 66
終了ページ: 71
抄録: ZnSnP(2) is a promising candidate as a solar absorbing material consisting of earth-abundant and low-toxic elements. In this study, the phosphidation method, where co-sputtered Zn–Sn thin films react with phosphorus gas, was adopted for fabricating ZnSnP(2) thin films. To establish the conditions for producing ZnSnP(2) thin films, we investigated the influence of phosphidation temperature on the product phases, and interpreted the experimental results using chemical potential diagrams of the Zn–Sn–P system. ZnSnP(2) thin films with a single phase were obtained by phosphidation at 500 °C under a phosphorus vapor pressure of 10[−2] atm. However, formation of ZnSnP(2)protrusions was observed on the surface of the thin films. Based on the experimental results and the chemical potential diagrams, it is indicated that un-reacted liquid Sn particles reacted with Zn and phosphorus gas to form ZnSnP(2) protrusions in a manner similar to the vapor-Liquid-Solid growth mode.
著作権等: © 2015. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
The full-text file will be made open to the public on 1 August 2017 in accordance with publisher's 'Terms and Conditions for Self-Archiving'.
This is not the published version. Please cite only the published version.
この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。
URI: http://hdl.handle.net/2433/202615
DOI(出版社版): 10.1016/j.tsf.2015.04.020
出現コレクション:学術雑誌掲載論文等

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