このアイテムのアクセス数: 44
このアイテムのファイル:
| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| j.ijfatigue.2022.106983.pdf | 1.67 MB | Adobe PDF | 見る/開く |
完全メタデータレコード
| DCフィールド | 値 | 言語 |
|---|---|---|
| dc.contributor.author | Xia, Yuanlin | en |
| dc.contributor.author | Suzuki, Makoto | en |
| dc.contributor.author | Xue, Peidong | en |
| dc.contributor.author | Hirai, Yoshikazu | en |
| dc.contributor.author | Tsuchiya, Toshiyuki | en |
| dc.contributor.alternative | 夏, 园林 | ja |
| dc.contributor.alternative | 鈴木, 誠 | ja |
| dc.contributor.alternative | 平井, 義和 | ja |
| dc.contributor.alternative | 土屋, 智由 | ja |
| dc.date.accessioned | 2022-09-06T07:26:02Z | - |
| dc.date.available | 2022-09-06T07:26:02Z | - |
| dc.date.issued | 2022-09 | - |
| dc.identifier.uri | http://hdl.handle.net/2433/276141 | - |
| dc.description.abstract | We evaluated the effects of the source wafers [bare silicon (Si) and silicon-on-insulator (SOI)] and fabrication process on the fracture strength and fatigue life of micromirrors. The fracture strength of the Si-made micromirrors was 10–30% lower than that of the SOI-made ones. The decrease in strength was caused by the sidewall roughness. The low fracture strength shortened the fatigue life of the Si-made mirrors, but there is no significant difference in fatigue exponents between the Si- and SOI-made samples. By improving the fabrication process, we will be able to realize highly reliable Si-made micromirrors at a low cost. | en |
| dc.language.iso | eng | - |
| dc.publisher | Elsevier BV | en |
| dc.rights | © 2022. This manuscript version is made available under the CC-BY-NC-ND 4.0 license https://creativecommons.org/licenses/by-nc-nd/4.0/ | en |
| dc.rights | The full-text file will be made open to the public on 1 September 2024 in accordance with publisher's 'Terms and Conditions for Self-Archiving' | en |
| dc.rights | This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 | en |
| dc.rights.uri | https://creativecommons.org/licenses/by-nc-nd/4.0/ | - |
| dc.subject | Fabrication process | en |
| dc.subject | Fracture strength | en |
| dc.subject | Fatigue life | en |
| dc.subject | Torsional beam | en |
| dc.subject | Micromirror | en |
| dc.title | Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon | en |
| dc.type | journal article | - |
| dc.type.niitype | Journal Article | - |
| dc.identifier.jtitle | International Journal of Fatigue | en |
| dc.identifier.volume | 162 | - |
| dc.relation.doi | 10.1016/j.ijfatigue.2022.106983 | - |
| dc.textversion | author | - |
| dc.identifier.artnum | 106983 | - |
| dcterms.accessRights | embargoed access | - |
| datacite.date.available | 2024-09-01 | - |
| dc.identifier.pissn | 0142-1123 | - |
| dc.identifier.eissn | 1879-3452 | - |
| 出現コレクション: | 学術雑誌掲載論文等 | |
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