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DCフィールド | 値 | 言語 |
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dc.contributor.author | FUJII, Tadashi | en |
dc.contributor.author | FUYUKI, Takashi | en |
dc.contributor.author | MATSUNAMI, Hiroyuki | en |
dc.date.accessioned | 2023-03-28T09:09:12Z | - |
dc.date.available | 2023-03-28T09:09:12Z | - |
dc.date.issued | 1992-10-30 | - |
dc.identifier.uri | http://hdl.handle.net/2433/281467 | - |
dc.description.abstract | Hydrogenated amorphous silicon carbon films are deposited using disilane and acetylene with vacuum ultraviolet light (147nm) emitted from a microwave-excited Xe resonance lamp. The film shows a high photoconductivity of 1.2 × 10⁻⁵S/cm at an optical bandgap of 2.0eV which is one order larger than that of device-quality films deposited by a glow discharge (GD) method. Because of high photoconductivity in this film, over-hydrogenation of carbon atom is avoided, and tetrahedral bondings seem to form rigid random networks. For an application to the window layer of amorphous silicon-alloy solar cells, p-type doping properties are examined. In this case, a photoconductivity of 3.9 × 10⁻⁶S/cm at an optical bandgap of 2.0eV is obtained, which is comparable to that of device-quality films deposited by a GD method. | en |
dc.language.iso | eng | - |
dc.publisher | Faculty of Engineering, Kyoto University | en |
dc.publisher.alternative | 京都大学工学部 | ja |
dc.subject.ndc | 500 | - |
dc.title | Deposition of Hydrogenated Amorphous Silicon Carbon Films Using Vacuum Ultraviolet Light | en |
dc.type | departmental bulletin paper | - |
dc.type.niitype | Departmental Bulletin Paper | - |
dc.identifier.ncid | AA00732503 | - |
dc.identifier.jtitle | Memoirs of the Faculty of Engineering, Kyoto University | en |
dc.identifier.volume | 54 | - |
dc.identifier.issue | 4 | - |
dc.identifier.spage | 315 | - |
dc.identifier.epage | 326 | - |
dc.textversion | publisher | - |
dc.sortkey | 09 | - |
dc.address | Department of Electrical Engineering II | en |
dc.address | Department of Electrical Engineering II | en |
dc.address | Department of Electrical Engineering II | en |
dcterms.accessRights | open access | - |
dc.identifier.pissn | 0023-6063 | - |
出現コレクション: | Vol.54 Part 4 |
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