Two Models for RHEED Specular Spot Intensity Recovery in Laser-triggered Chemical Beam Epitaxy GaP Growth

Abstract

RHEED specular spot intensity (RSSI) has been observed while growing GaP by laser-triggered chemical beam epitaxy. The intensity decreases after each laser pulse, and then it recovers the original value. We present two models in order to explain the RSSI changes. The first model takes the chemisorption velocity of metalorganics as a limiting factor in RSSI recovery speed. On the other hand, the second model considers the reaction time of gallium with phosphorus as a limiting factor. The second model properly fits the experimental data and it allows a deeper understanding of chemical reactions on GaP surface during chemical beam epitaxial growth.