Access count of this item: 62
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| MEMSYS.2018.8346652.pdf | 789.82 kB | Adobe PDF | View/Open |
| Title: | Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array |
| Authors: | Uno, Akiko Hirai, Yoshikazu    https://orcid.org/0000-0003-0835-7314 (unconfirmed)Tabata, Osamu Tsuchiya, Toshiyuki https://orcid.org/0000-0002-7846-5831 (unconfirmed) |
| Author's alias: | 宇野, 亜季子 平井, 義和 田畑, 修 土屋, 智由 |
| Issue Date: | 2018 |
| Publisher: | IEEE |
| Journal title: | 2018 IEEE Micro Electro Mechanical Systems (MEMS) |
| Start page: | 704 |
| End page: | 707 |
| Abstract: | We report a low-voltage and large-displacement electrostatic deformable mirror for in vivo retinal imaging by adaptive-optics optical coherence tomography. The mirror utilizes an electrostatic piston actuator which allows bottom electrodes to move vertically to keep the gap small to maintain large actuation force at low actuation voltage. An 8-mm-diameter mirror device was fabricated from two components; the mirror part and the actuator part. The parts were assembled with 7-μm-gap defined by an SU-8 layer. We successfully demonstrated operation of the mirror in various Zernike modes. |
| Description: | 2018 IEEE Micro Electro Mechanical Systems (MEMS), 21-25 Jan. 2018. |
| Rights: | © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 |
| URI: | http://hdl.handle.net/2433/284803 |
| DOI(Published Version): | 10.1109/MEMSYS.2018.8346652 |
| Appears in Collections: | Journal Articles |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.