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| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| MEMSYS.2018.8346652.pdf | 789.82 kB | Adobe PDF | 見る/開く |
| タイトル: | Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array |
| 著者: | Uno, Akiko Hirai, Yoshikazu    https://orcid.org/0000-0003-0835-7314 (unconfirmed)Tabata, Osamu Tsuchiya, Toshiyuki https://orcid.org/0000-0002-7846-5831 (unconfirmed) |
| 著者名の別形: | 宇野, 亜季子 平井, 義和 田畑, 修 土屋, 智由 |
| 発行日: | 2018 |
| 出版者: | IEEE |
| 誌名: | 2018 IEEE Micro Electro Mechanical Systems (MEMS) |
| 開始ページ: | 704 |
| 終了ページ: | 707 |
| 抄録: | We report a low-voltage and large-displacement electrostatic deformable mirror for in vivo retinal imaging by adaptive-optics optical coherence tomography. The mirror utilizes an electrostatic piston actuator which allows bottom electrodes to move vertically to keep the gap small to maintain large actuation force at low actuation voltage. An 8-mm-diameter mirror device was fabricated from two components; the mirror part and the actuator part. The parts were assembled with 7-μm-gap defined by an SU-8 layer. We successfully demonstrated operation of the mirror in various Zernike modes. |
| 記述: | 2018 IEEE Micro Electro Mechanical Systems (MEMS), 21-25 Jan. 2018. |
| 著作権等: | © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 |
| URI: | http://hdl.handle.net/2433/284803 |
| DOI(出版社版): | 10.1109/MEMSYS.2018.8346652 |
| 出現コレクション: | 学術雑誌掲載論文等 |
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