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タイトル: Investigation of small-fraction molecular impurities in high-pressure helium plasmas using optical plasma diagnostic methods
著者: Urabe, Keiichiro
Toyoda, Minami
Matsuoka, Yoshinori
Eriguchi, Koji  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0003-1485-5897 (unconfirmed)
著者名の別形: 占部, 継一郎
豊田, みなみ
松岡, 善範
江利口, 浩二
キーワード: high-pressure plasma
molecular impurity
optical emission spectroscopy
laser absorption spectroscopy
発行日: Feb-2024
出版者: IOP Publishing
誌名: Plasma Sources Science and Technology
巻: 33
号: 2
論文番号: 025011
抄録: In high-pressure plasmas using gases diluted via a rare gas, small-fraction impurities in the discharge space significantly impact the basic plasma parameters and excited-species generation processes. This study investigated the behaviors of molecular impurities in a dielectric barrier discharge (DBD) generated in a flow of high-purity He gas using optical plasma diagnostic methods. The optical emission spectra obtained under various discharge conditions (pressure, flow rate, and voltage frequency) indicated that the major impurity species in the He DBD was the H₂O molecule, and the DBD decomposed the H₂O before reaching the measurement spot. To quantitatively analyze the H₂O fraction, time-resolved laser absorption spectroscopy was performed to measure the exponential decay time of He metastable (Hem) atoms in the He-DBD. The H₂O fraction in the He gas flow was derived from the dependence of Hem lifetime decay on the voltage frequency. In addition, a model was proposed to estimate the H₂O fraction under various He pressure and flow rate conditions from reference data. The procedures to perform optical plasma diagnostics and evaluate the fraction and behavior of H₂O impurities are expected to facilitate a better understanding and control of high-pressure plasmas.
著作権等: This is the Accepted Manuscript version of an article accepted for publication in [Plasma Sources Science and Technology]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.1088/1361-6595/ad1f38
CC BY-NC-ND licence
The full-text file will be made open to the public on 9 February 2025 in accordance with publisher's 'Terms and Conditions for Self-Archiving'.
This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。
URI: http://hdl.handle.net/2433/287297
DOI(出版社版): 10.1088/1361-6595/ad1f38
出現コレクション:学術雑誌掲載論文等

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