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| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| JApplPhys_97_104316.pdf | 836.34 kB | Adobe PDF | 見る/開く |
| タイトル: | Artificial control of ZnO nanodots by ion-beam nanopatterning |
| 著者: | Kim, Sang-Woo Ueda, Masaya Funato, Mitsuru    https://orcid.org/0000-0002-5455-3757 (unconfirmed)Fujita, Shigeo Fujita, Shizuo https://orcid.org/0000-0001-6384-6693 (unconfirmed) |
| 発行日: | 15-May-2005 |
| 出版者: | American Institute of Physics |
| 誌名: | JOURNAL OF APPLIED PHYSICS |
| 巻: | 97 |
| 号: | 10 |
| 論文番号: | 104316 |
| 抄録: | The use of focused ion-beam (FIB) nanopatterning for manipulating self-assembled ZnO nanodots is described. Highly aligned ZnO-nanodot arrays with various periodicities (e.g., 750, 190, and 100 nm) on FIB-nanopatterned SiO[2]/Si substrates were prepared by metal-organic chemical-vapor deposition (MOCVD). The artificially assembled ZnO nanodots had an amorphous structure. Ga atoms incorporated into the surface areas of FIB-patterned nanoholes during FIB engraving were found to play an important role in the artificial control of ZnO, resulting in the production of ZnO nanodots on the FIB-nanopatterned areas. The nanodots evolved into single-crystalline dot clusters and rods with increasing MOCVD-growth time. In addition, microphotoluminescence measurements showed that the ZnO-nanodot arrays have low-dimensional quantum characteristics. |
| 著作権等: | Copyright 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. |
| URI: | http://hdl.handle.net/2433/39713 |
| DOI(出版社版): | 10.1063/1.1150415 |
| 出現コレクション: | 学術雑誌掲載論文等 |
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