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Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Danno, Katsunori | en |
dc.contributor.author | Kimoto, Tsunenobu | en |
dc.date.accessioned | 2007-08-22T05:36:34Z | - |
dc.date.available | 2007-08-22T05:36:34Z | - |
dc.date.issued | 2006-12-01 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | http://hdl.handle.net/2433/39722 | - |
dc.description.abstract | Deep levels in n-type 4H-SiC epilayers have been investigated by deep level transient spectroscopy(DLTS). The Z1/2 and EH6/7 centers are dominant in as-grown samples. After electron irradiation at 116 keV, by which only carbon atoms may be displaced, the Z1/2 and EH6/7 concentrations are significantly increased. The Z[1/2] and EH[6/7] centers are stable up to 1500–1600 °C and their concentrations are decreased by annealing at 1600–1700 °C. In the irradiated samples, the trap concentrations of the Z[1/2] and EH[6/7] centers are increased with the 0.7 power of the electron fluence. The concentrations of the Z[1/2] and EH[6/7] centers are very close to each other in all kinds of samples, as-grown, as-irradiated, and annealed ones, even though the condition of growth, irradiation (energy and fluence), and annealing has been changed. This result suggests that both Z[1/2] and EH[6/7] centers microscopically contain the same defect such as a carbonvacancy. | en |
dc.language.iso | eng | - |
dc.publisher | American Institute of Physics | en |
dc.rights | Copyright 2006 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | en |
dc.title | Investigation of deep levels in n-type 4H-SiC epilayers irradiated with low-energy electrons | en |
dc.type | journal article | - |
dc.type.niitype | Journal Article | - |
dc.identifier.jtitle | JOURNAL OF APPLIED PHYSICS | en |
dc.identifier.volume | 100 | - |
dc.identifier.issue | 11 | - |
dc.relation.doi | 10.1063/1.2401658 | - |
dc.textversion | publisher | - |
dc.identifier.artnum | 113728 | - |
dcterms.accessRights | open access | - |
Appears in Collections: | Journal Articles |
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