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Title: Effects of gas-phase thermal decompositions of chemical vapor deposition source molecules on the deposition of (Ba, Sr)TiO3 films: A study by in situ Fourier transform infared spectroscopy
Authors: Momose, S
Nakamura, T
Tachibana, K
Keywords: in situ FT-IR spectroscopy
(Ba,Sr)TiO3
liquid-source MOCVD
thermal decomposition
Ti(t-BuO)(2)(DPM)(2)
Sr(DPM)(2)
Issue Date: 2000
Publisher: INST PURE APPLIED PHYSICS
Journal title: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume: 39
Issue: 9B
Start page: 5384
End page: 5388
URI: http://hdl.handle.net/2433/5803
DOI(Published Version): 10.1143/JJAP.39.5384
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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