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Title: Formation mechanism of strontium and titanium oxide films by metalorganic chemical vapor deposition: An isotopic labeling study using O-18(2)
Authors: Nakamura, T
Momose, S
Tachibana, K
Keywords: isotope labeling
TOF-SIMS
O-18(2)
SrO
TiO2
SrTiO2
(Ba, Sr)TiO3
MOCVD
Sr(DPM)(2)
Ti(t-BuO)(2)(DPM)(2)
Issue Date: 2001
Publisher: INST PURE APPLIED PHYSICS
Journal title: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume: 40
Issue: 11
Start page: 6619
End page: 6622
URI: http://hdl.handle.net/2433/6162
DOI(Published Version): 10.1143/JJAP.40.6619
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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