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Title: Thermal decomposition mechanism of a titanium source, Ti-(MPD)-(METHD)(2), in MOCVD
Authors: Nakamura, T
Nishimura, T
Tachibana, K
Issue Date: 2004
Publisher: ELECTROCHEMICAL SOC INC
Journal title: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 151
Issue: 12
Start page: C806
End page: C810
URI: http://hdl.handle.net/2433/6166
DOI(Published Version): 10.1149/1.1819651
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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