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Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Okada, T | en |
dc.contributor.author | Kimoto, T | en |
dc.contributor.author | Noda, H | en |
dc.contributor.author | Ebisui, T | en |
dc.contributor.author | Matsunami, H | en |
dc.contributor.author | Inoko, F | en |
dc.date.accessioned | 2007-03-28T04:16:38Z | - |
dc.date.available | 2007-03-28T04:16:38Z | - |
dc.date.issued | 2002 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/2433/6666 | - |
dc.language.iso | eng | - |
dc.publisher | INST PURE APPLIED PHYSICS | en |
dc.subject | 4H-SiC | en |
dc.subject | homoepitaxy | en |
dc.subject | off-cut substrate | en |
dc.subject | surface morphological fault | en |
dc.subject | transmission electron microscopy | en |
dc.title | Correspondence between surface morphological faults and crystallographic defects in 4H-SiC homoepitaxial film | en |
dc.type | journal article | - |
dc.type.niitype | Journal Article | - |
dc.identifier.jtitle | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | en |
dc.identifier.volume | 41 | - |
dc.identifier.issue | 11A | - |
dc.identifier.spage | 6320 | - |
dc.identifier.epage | 6326 | - |
dc.relation.doi | 10.1143/JJAP.41.6320 | - |
dc.textversion | none | - |
dcterms.accessRights | metadata only access | - |
Appears in Collections: | Graduate School of Engineering Literature Database |
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