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dc.contributor.authorSuda, Jen
dc.contributor.authorNakamura, Sen
dc.contributor.authorMiura, Men
dc.contributor.authorKimoto, Ten
dc.contributor.authorMatsunami, Hen
dc.date.accessioned2007-03-28T03:52:19Z-
dc.date.available2007-03-28T03:52:19Z-
dc.date.issued2002-
dc.identifier.issn0021-4922-
dc.identifier.urihttp://hdl.handle.net/2433/7367-
dc.language.isoeng-
dc.publisherINST PURE APPLIED PHYSICSen
dc.subjectSiCen
dc.subjectSCMen
dc.subjectSSRMen
dc.subjectSIMSen
dc.subjectCVDen
dc.subjectdopingen
dc.titleScanning capacitance and spreading resistance microscopy of SiC multiple-pn-junction structureen
dc.typejournal article-
dc.type.niitypeJournal Article-
dc.identifier.jtitleJAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERSen
dc.identifier.volume41-
dc.identifier.issue1AB-
dc.identifier.spageL40-
dc.identifier.epageL42-
dc.relation.doi10.1143/JJAP.41.L40-
dc.textversionnone-
dcterms.accessRightsmetadata only access-
Appears in Collections:Graduate School of Engineering Literature Database

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