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| Title: | Fast epitaxial growth of thick 4H-SiC with specular surface by chimney-type vertical hot-wall chemical vapor deposition |
| Authors: | Fujiwara, H Danno, K Kimoto, T    https://orcid.org/0000-0002-6649-2090 (unconfirmed)Tojo, T Matsunami, H |
| Keywords: | vertical hot-wall CVD micropipe closing photoluminescence fast epitaxy |
| Issue Date: | 2004 |
| Publisher: | TRANS TECH PUBLICATIONS LTD |
| Journal title: | SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2 |
| Volume: | 457-460 |
| Start page: | 205 |
| End page: | 208 |
| URI: | http://hdl.handle.net/2433/8744 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
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