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このアイテムのファイル:
| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| NIMB-v242-p517.pdf | 212.06 kB | Adobe PDF | 見る/開く |
| タイトル: | Molecular dynamics simulations of surface modification and damage formation by gas cluster ion impacts |
| 著者: | Aoki, Takaaki Matsuo, Jiro    https://orcid.org/0000-0003-0684-3677 (unconfirmed) |
| キーワード: | Molecular dynamics Cluster ion beam Damage formation |
| 発行日: | Jan-2006 |
| 出版者: | Elsevier B.V. |
| 引用: | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Vol.242 No.1-2 page.517-519 |
| 誌名: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| 巻: | 242 |
| 号: | 1-2 |
| 開始ページ: | 517 |
| 終了ページ: | 519 |
| 抄録: | Damage formation process by gas cluster impact was studied using molecular dynamics simulations. Ar gas clusters with various sizes (several tens to several thousand) and energies (several to several tens keV, totally) were irradiated on Si substrates. The relationship between mean damage depth, incident energy and cluster size was examined and the model and conditions to cause damage by cluster impact were discussed. |
| 記述: | Ion Beam Modification of Materials - Proceedings of the 14th International Conference on Ion Beam Modification of Materials |
| 著作権等: | This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 |
| URI: | http://hdl.handle.net/2433/8930 |
| DOI(出版社版): | 10.1016/j.nimb.2005.09.011 |
| 出現コレクション: | 学術雑誌掲載論文等 |
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