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NIMB-v228-p46.pdf | 400.46 kB | Adobe PDF | 見る/開く |
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dc.contributor.author | Aoki, Takaaki | en |
dc.contributor.author | Matsuo, Jiro | en |
dc.date.accessioned | 2006-06-05T02:18:15Z | - |
dc.date.available | 2006-06-05T02:18:15Z | - |
dc.date.issued | 2005-01 | - |
dc.identifier.citation | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Vol.228 page.46-50 | - |
dc.identifier.issn | 0168-583X | - |
dc.identifier.uri | http://hdl.handle.net/2433/8932 | - |
dc.description | Proceedings of the Seventh International Conference on Computer Simulation of Radiation Effects in Solids | en |
dc.description.abstract | Molecular dynamics (MD) simulations of cluster and solid target collisions were performed in order to understand the relationship between surface deformation processes and cluster sizes. MD simulations of single impacts of clusters with various sizes showed that, when a cluster size is less than 10 000 atoms, a crater-like damage could be caused at 20 keV of total energy, while no damage was observed at Ar10 000 and Ar20 000 clusters. The surface morphology change was examined by MD of sequential irradiation of Ar clusters under various conditions. When the initial roughness of the surface was about 10 Å in r.m.s. and the total incident energy was 20 keV, the surface roughness was reduced with the impact of Ar13 333 or larger cluster. The MD results give information about the final value and decay speed of surface roughness, which are required to optimize the cluster ion irradiation condition for various nano-scale modification processes. | en |
dc.format.extent | 410071 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | - |
dc.publisher | ELSEVIER SCIENCE BV | en |
dc.rights | This is not the published version. Please cite only the published version. | en |
dc.rights | この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 | ja |
dc.subject | Gas cluster ion beam | en |
dc.subject | Surface smoothing | en |
dc.subject | Molecular dynamics | en |
dc.subject | Surface morphology | en |
dc.title | Molecular dynamics simulations of sequential cluster ion impacts | en |
dc.type | journal article | - |
dc.type.niitype | Journal Article | - |
dc.identifier.jtitle | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | en |
dc.identifier.volume | 228 | - |
dc.identifier.issue | 1-4 | - |
dc.identifier.spage | 46 | - |
dc.identifier.epage | 80 | - |
dc.relation.doi | 10.1016/j.nimb.2004.10.021 | - |
dc.textversion | author | - |
dc.relation.url | http://dx.doi.org/doi:10.1016/j.nimb.2004.10.021 | - |
dcterms.accessRights | open access | - |
dc.description.degreeObjectType | Article | - |
出現コレクション: | 学術雑誌掲載論文等 |
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