ブラウズ : キーワード O-2 addition
検索結果表示: 1 - 2 / 2
| 書誌情報 | ファイル |
|---|---|
| CO removal from reformed fuels over Cu and precious metal catalysts Utaka, T; Takeguchi, T; Kikuchi, R; Eguchi, K (2003) APPLIED CATALYSIS A-GENERAL, 246(1): 117-124 | |
| Etching of high-k dielectric HfO2 films in BCl3-containing plasmas enhanced with O-2 addition Kitagawa, T; Nakamura, K; Osari, K; Takahashi, K; Ono, K; Oosawa, M; Hasaka, S; Inoue, M (2006) JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 45(8-11): L297-L300 |