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タイトル: Triple Shockley type stacking faults in 4H-SiC epilayers
著者: Feng, Gan
Suda, Jun  KAKEN_id
Kimoto, Tsunenobu  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
キーワード: photoluminescence
semiconductor epitaxial layers
silicon compounds
stacking faults
transmission electron microscopy
wide band gap semiconductors
発行日: Mar-2009
出版者: American Institute of Physics
誌名: APPLIED PHYSICS LETTERS
巻: 94
号: 9
論文番号: 091910
抄録: 4H-SiC epilayers have been characterized by microphotoluminescence (micro-PL) spectroscopy and micro-PL intensity mapping at room temperature. A type of stacking fault (SF) with a peak emission wavelength at 480 nm (2.58 eV) has been identified. The shape of this SF is triangular revealed by the micro-PL intensity mapping. Conventional and high-resolution transmission electron microscopies have been carried out to investigate the structure of this SF. Its stacking sequence is determined as (3, 5) in Zhdanov’s notation, which is consistent with that of the triple Shockley SF. The formation mechanism of this SF is also discussed.
著作権等: Copyright 2009 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in APPLIED PHYSICS LETTERS 94, 091910 (2009) and may be found at http://link.aip.org/link/APPLAB/v94/i9/p091910/s1
URI: http://hdl.handle.net/2433/109896
DOI(出版社版): 10.1063/1.3095508
関連リンク: http://link.aip.org/link/APPLAB/v94/i9/p091910/s1
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