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Title: Molecular dynamics simulations for gas cluster ion beam processes
Authors: Aoki, Takaaki  kyouindb  KAKEN_id  orcid (unconfirmed)
Seki, Toshio  kyouindb  KAKEN_id  orcid (unconfirmed)
Matsuo, Jiro  kyouindb  KAKEN_id  orcid (unconfirmed)
Author's alias: 青木, 学聡
Keywords: Cluster ion beam
Molecular dynamics simulation
Crater formation
Surface modification
Issue Date: 24-Mar-2010
Publisher: Elsevier Ltd
Journal title: Vacuum
Volume: 84
Issue: 8
Start page: 994
End page: 998
Abstract: Molecular dynamics (MD) simulations of large argon clusters impacting on silicon targets were performed. The characteristics of crater formation, a typical collisional effect with large cluster impact were examined from the viewpoint of incident energy, cluster size and incident angle. The MD simulation results suggested that the condition where an incident cluster penetrates into the solid target and causes a crater is mainly dominated by the incident energy-per-atom rather than total incident energy of the cluster. Additionally, the MD simulations of sequential multiple cluster impacts and grazing-angle cluster irradiation on irregular surface structures were studied to characterize the surface modification effects with large cluster ion beam process.
Rights: © 2009 Elsevier Ltd
This is not the published version. Please cite only the published version.
DOI(Published Version): 10.1016/j.vacuum.2009.11.018
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