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Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kawahara, Koutarou | en |
dc.contributor.author | Suda, Jun | en |
dc.contributor.author | Pensl, Gerhard | en |
dc.contributor.author | Kimoto, Tsunenobu | en |
dc.date.accessioned | 2011-09-13T00:29:10Z | - |
dc.date.available | 2011-09-13T00:29:10Z | - |
dc.date.issued | 2010 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | http://hdl.handle.net/2433/146887 | - |
dc.language.iso | eng | - |
dc.publisher | AMER INST PHYSICS | en |
dc.title | Reduction of deep levels generated by ion implantation into n- and p-type 4H-SiC | en |
dc.type | journal article | - |
dc.type.niitype | Journal Article | - |
dc.identifier.jtitle | JOURNAL OF APPLIED PHYSICS | en |
dc.identifier.volume | 108 | - |
dc.identifier.issue | 3 | - |
dc.relation.doi | 10.1063/1.3456159 | - |
dc.textversion | none | - |
dc.identifier.artnum | 33706 | - |
dcterms.accessRights | metadata only access | - |
Appears in Collections: | Graduate School of Engineering Literature Database |
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