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タイトル: Nanograting formation on metals in air with interfering femtosecond laser pulses
著者: Miyazaki, Kenzo
Miyaji, Godai
Inoue, Toshishige
著者名の別形: 宮崎, 健創
発行日: 17-Aug-2015
出版者: AIP Publishing
誌名: Applied Physics Letters
巻: 107
号: 7
論文番号: 071103
抄録: It is demonstrated that a homogeneous nanograting having the groove period much smaller than the laser wavelength (∼800 nm) can be fabricated on metals in air through ablation induced by interfering femtosecond laser pulses (100 fs at a repetition rate of 10 Hz). Morphological changes on stainless steel and Ti surfaces, observed with an increase in superimposed shots of the laser pulses at a low fluence, have shown that the nanograting is developed through bonding structure change at the interference fringes, plasmonic near-field ablation to create parallel grooves on the fringe, and subsequent excitation of surface plasmon polaritons to regulate the groove intervals at 1/3 or 1/4 of the fringe period over the whole irradiated area. Calculation for a model target having a thin oxide layer on the metal substrate reproduces well the observed groove periods and explains the mechanism for the nanograting formation.
著作権等: © 2015 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
URI: http://hdl.handle.net/2433/201897
DOI(出版社版): 10.1063/1.4928670
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