<研究ノート>水素イオンビーム照射装置の開発とin situ物性測定

Abstract

Introduction of hydrogen can significantly alter the physical properties of materials. However, conventional methods of hydrogen introduction are limited to a few materials and need very long time to introduce a large amount of hydrogen. We have focused on a low-temperature hydrogen ion beam irradiation, which is, in principle, applicable to any material of interest. In this study, we have developed a new low-temperature hydrogen ion beam apparatus for in situ physical property measurement, and low-temperature irradiation effects on ZnO thin films were investigated for the first time.