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Title: Carrier compensation near tail region in aluminum- or boron-implanted 4H-SiC(0001)
Authors: Negoro, Y
Kimoto, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Matsunami, H
Issue Date: 15-Aug-2005
Publisher: American Institute of Physics
Citation: Y. Negoro et al., J. Appl. Phys. 98, 043709 (2005)
Journal title: Journal of Applied Physics
Volume: 98
Issue: 4
Thesis number: 043709
Rights: Copyright 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
URI: http://hdl.handle.net/2433/24191
DOI(Published Version): 10.1063/1.2030411
Link: Web of Science
Related Link: http://link.aip.org/link/?jap/98/043709
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