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Title: | Carrier compensation near tail region in aluminum- or boron-implanted 4H-SiC(0001) |
Authors: | Negoro, Y Kimoto, T https://orcid.org/0000-0002-6649-2090 (unconfirmed) Matsunami, H |
Issue Date: | 15-Aug-2005 |
Publisher: | American Institute of Physics |
Citation: | Y. Negoro et al., J. Appl. Phys. 98, 043709 (2005) |
Journal title: | Journal of Applied Physics |
Volume: | 98 |
Issue: | 4 |
Thesis number: | 043709 |
Rights: | Copyright 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. |
URI: | http://hdl.handle.net/2433/24191 |
DOI(Published Version): | 10.1063/1.2030411 |
Link: | Web of Science |
Related Link: | http://link.aip.org/link/?jap/98/043709 |
Appears in Collections: | Journal Articles |
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