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タイトル: | Epitaxial growth of undoped and Li-doped NiO thin films on α-Al2O3 substrates by mist chemical vapor deposition |
著者: | Ikenoue, Takumi https://orcid.org/0000-0002-3753-6453 (unconfirmed) Inoue, Junki Miyake, Masao https://orcid.org/0000-0001-8208-4030 (unconfirmed) Hirato, Tetsuji https://orcid.org/0000-0003-3030-1632 (unconfirmed) |
著者名の別形: | 池之上, 卓己 三宅, 正男 平藤, 哲司 |
キーワード: | A3. Mist CVD B1. Li-doped nickel oxide B1. Nickel oxide B2. Wide bandgap oxide semiconductor |
発行日: | 1-Feb-2019 |
出版者: | Elsevier B.V. |
誌名: | Journal of Crystal Growth |
巻: | 507 |
開始ページ: | 379 |
終了ページ: | 383 |
抄録: | Undoped and Li-doped NiO thin films were grown on α-Al₂O₃ (0 0 0 1) substrates by mist chemical vapor deposition. Both undoped and Li-doped NiO thin films grew bi-epitaxially on the substrates with crystallographic orientation relationships of NiO(1 1 1)[ 1 0] || α-Al₂O₃(0 0 0 1)[0 1 0] and NiO(1 1 1)[1 0] || α-Al₂O₃(0 0 0 1)[0 1 0]. In the Li-doped NiO thin film, a periodic structure was observed, in accordance with a mirror-symmetrical oxygen layer on the terraces of the substrate. Both undoped and Li-doped NiO thin films exhibited high transmittance (>80%) in the visible-light region and optical bandgaps of 3.7–3.8 eV. The undoped NiO thin film showed insulating properties and a resistivity of 10⁶ Ω cm or higher. In contrast, the Li-doped NiO thin films had resistivities of 10¹–10⁵ Ω cm, depending on the Li precursor concentration. Furthermore, they exhibited positive Seebeck coefficients, indicating their p-type conductivity. These results indicate that Li dopants effectively act as acceptors in NiO thin films. |
著作権等: | © 2019. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ The full-text file will be made open to the public on 1 February 2021 in accordance with publisher's 'Terms and Conditions for Self-Archiving' この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 This is not the published version. Please cite only the published version. |
URI: | http://hdl.handle.net/2433/252436 |
DOI(出版社版): | 10.1016/j.jcrysgro.2018.11.032 |
出現コレクション: | 学術雑誌掲載論文等 |
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