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| Title: | Effect of C/Si ratio on spiral growth on 6H-SiC (0001) |
| Authors: | Nakamura, S Kimoto, T    https://orcid.org/0000-0002-6649-2090 (unconfirmed)Matsunami, H |
| Keywords: | silicon carbide (SiC) spiral growth step-flow growth chemical vapordeposition (CVD) atomic force microscopy (AFM) |
| Issue Date: | 2003 |
| Publisher: | INST PURE APPLIED PHYSICS |
| Journal title: | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS |
| Volume: | 42 |
| Issue: | 7B |
| Start page: | L846 |
| End page: | L848 |
| URI: | http://hdl.handle.net/2433/6144 |
| DOI(Published Version): | 10.1143/JJAP.42.L846 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
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