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Title: In-situ RHEED analysis during alpha-SiC homoepitaxy on (0001)Si- and (000(1)over-bar)C-faces by gas source molecular beam epitaxy
Authors: Hatayama, T
Fuyuki, T
Nakamura, S
Kurobe, K
Kimoto, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Matsunami, H
Keywords: gas source molecular beam epitaxy
RHEED
surface structure
Issue Date: 2000
Publisher: TRANS TECH PUBLICATIONS LTD
Journal title: SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2
Volume: 338-3
Start page: 361
End page: 364
URI: http://hdl.handle.net/2433/8753
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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