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Title: | In-situ RHEED analysis during alpha-SiC homoepitaxy on (0001)Si- and (000(1)over-bar)C-faces by gas source molecular beam epitaxy |
Authors: | Hatayama, T Fuyuki, T Nakamura, S Kurobe, K Kimoto, T https://orcid.org/0000-0002-6649-2090 (unconfirmed) Matsunami, H |
Keywords: | gas source molecular beam epitaxy RHEED surface structure |
Issue Date: | 2000 |
Publisher: | TRANS TECH PUBLICATIONS LTD |
Journal title: | SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2 |
Volume: | 338-3 |
Start page: | 361 |
End page: | 364 |
URI: | http://hdl.handle.net/2433/8753 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |
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