1. Kyoto University Research Information Repository
  2. 090_Graduate School of Engineering
  3. Graduate School of Engineering Literature Database
Downloads: 0

    Please use this identifier to cite or link to this item: http://hdl.handle.net/2433/8843
Files in This Item:
There are no files associated with this item.
Full metadata record
DC FieldValueLanguage
dc.contributor.authorNegoro, Yen
dc.contributor.authorKimoto, Ten
dc.contributor.authorMatsunami, Hen
dc.date.accessioned2007-03-28T03:33:09Z-
dc.date.available2007-03-28T03:33:09Z-
dc.date.issued2005-
dc.identifier.issn0255-5476-
dc.identifier.urihttp://hdl.handle.net/2433/8843-
dc.language.isoeng-
dc.publisherTRANS TECH PUBLICATIONS LTDen
dc.subjectimplantationen
dc.subjectdevice processen
dc.subjectannealingen
dc.subjectdiffusionen
dc.subject(11-20) faceen
dc.subjectgraphite capen
dc.titleTechnological aspects of ion implantation in SiC device processesen
dc.typejournal article-
dc.type.niitypeJournal Article-
dc.identifier.jtitleSILICON CARBIDE AND RELATED MATERIALS 2004en
dc.identifier.volume483-
dc.identifier.spage599-
dc.identifier.epage604-
dc.textversionnone-
dcterms.accessRightsmetadata only access-
Appears in Collections:Graduate School of Engineering Literature Database

Show simple item record

Export to RefWorks


Export Format: 


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.