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| Title: | Crystallographic defects under surface morphological defects of 4H-SiC homoepitaxial films |
| Authors: | Okada, T Kimoto, T    https://orcid.org/0000-0002-6649-2090 (unconfirmed)Yamai, K Matsunami, H Inoko, F |
| Keywords: | 4H-SiC homoepitaxy surface morphological defect crystallographic defect transmission electron microscopy (TEM) |
| Issue Date: | 2004 |
| Publisher: | TRANS TECH PUBLICATIONS LTD |
| Journal title: | SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2 |
| Volume: | 457-460 |
| Start page: | 521 |
| End page: | 524 |
| URI: | http://hdl.handle.net/2433/8853 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
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