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| 書誌情報 | ファイル |
|---|---|
| Diagnosis of oxidation reactions in metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films by in situ Fourier transform infrared spectroscopy Momose, S; Sahara, R; Nakamura, T; Tachibana, K (2001) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(9B): 5501-5506 | |
| Reaction mechanism of alkoxy derivatives of titanium diketonates as source molecules in liquid source metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films: A study by in situ infrared absorption spectroscopy Nakamura, T; Momose, S; Sahara, R; Tachibana, K (2002) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 41(11B): 6624-6627 |