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| 書誌情報 | ファイル |
|---|---|
| Thermal decomposition mechanism of a titanium source, Ti-(MPD)-(METHD)(2), in MOCVD Nakamura, T; Nishimura, T; Tachibana, K (2004) JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 151(12): C806-C810 | |
| In situ infrared spectroscopic study on a titanium source in MOCVD Nakamura, T; Nishimura, T; Momose, S; Tachibana, K (2004) JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 151(10): C605-C609 | |
| Plasma copolymerization of C6F6/C5F8 for application of low-dielectric-constant fluorinated amorphous carbon films and its gas-phase diagnostics using in situ Fourier transform infrared spectroscopy Shirafuji, T; Tsuchino, A; Nakamura, T; Tachibana, K (2004) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(5A): 2697-2703 |