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| 書誌情報 | ファイル |
|---|---|
| Plasma copolymerization of C6F6/C5F8 for application of low-dielectric-constant fluorinated amorphous carbon films and its gas-phase diagnostics using in situ Fourier transform infrared spectroscopy Shirafuji, T; Tsuchino, A; Nakamura, T; Tachibana, K (2004) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(5A): 2697-2703 | |
| Spectroscopic study on metallorganic chemical vapor deposition of manganese oxide films Nakamura, T; Tai, R; Nishimura, T; Tachibana, K (2005) JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(9): C584-C587 | |
| Quantum chemical study on decomposition and polymer deposition in perfluorocarbon plasmas: Molecular orbital calculations of excited states of perfluorocarbons Nakamura, T; Motomura, H; Tachibana, K (2001) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(2A): 847-854 | |
| Plasma enhanced chemical vapor deposition of fluorinated amorphous carbon films on the surface with reverse tapered microstructures Shirafuji, T; Wada, T; Kashiwagi, M; Nakamura, T; Tachibana, K (2003) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 42(7A): 4504-4509 |
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