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| 書誌情報 | ファイル |
|---|---|
| Effects of gas-phase thermal decompositions of chemical vapor deposition source molecules on the deposition of (Ba, Sr)TiO3 films: A study by in situ Fourier transform infared spectroscopy Momose, S; Nakamura, T; Tachibana, K (2000) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 39(9B): 5384-5388 | |
| Microdischarge optical emission spectroscopy as a novel diagnostic tool for metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films Momose, S; Nakamura, T; Tachibana, K (2000) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 39(2A): 555-559 | |
| Radical kinetics for polymer film deposition in fluorocarbon (C4F8, C3F6 and C5F8) plasmas Takahashi, K; Itoh, A; Nakamura, T; Tachibana, K (2000) THIN SOLID FILMS, 374(2): 303-310 |