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書誌情報 | ファイル |
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Radical kinetics for polymer film deposition in fluorocarbon (C4F8, C3F6 and C5F8) plasmas Takahashi, K; Itoh, A; Nakamura, T; Tachibana, K (2000) THIN SOLID FILMS, 374(2): 303-310 | |
Plasma copolymerization of C6F6/C5F8 for application of low-dielectric-constant fluorinated amorphous carbon films and its gas-phase diagnostics using in situ Fourier transform infrared spectroscopy Shirafuji, T; Tsuchino, A; Nakamura, T; Tachibana, K (2004) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(5A): 2697-2703 | |
Plasma enhanced chemical vapor deposition of fluorinated amorphous carbon films on the surface with reverse tapered microstructures Shirafuji, T; Wada, T; Kashiwagi, M; Nakamura, T; Tachibana, K (2003) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 42(7A): 4504-4509 |
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