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Film precursor formation in metalorganic chemical vapor deposition of barium strontium titanate films: A study by microdischarge optical emission spectroscopy Momose, S; Nakamura, T; Tachibana, K (2002) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 41(2A): 778-783 | |
Effects of gas-phase thermal decompositions of chemical vapor deposition source molecules on the deposition of (Ba, Sr)TiO3 films: A study by in situ Fourier transform infared spectroscopy Momose, S; Nakamura, T; Tachibana, K (2000) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 39(9B): 5384-5388 | |
Formation mechanism of strontium and titanium oxide films by metalorganic chemical vapor deposition: An isotopic labeling study using O-18(2) Nakamura, T; Momose, S; Tachibana, K (2001) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(11): 6619-6622 |
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