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| 書誌情報 | ファイル |
|---|---|
| Film precursor formation in metalorganic chemical vapor deposition of barium strontium titanate films: A study by microdischarge optical emission spectroscopy Momose, S; Nakamura, T; Tachibana, K (2002) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 41(2A): 778-783 | |
| Effects of O-2 gas on reaction mechanisms in the chemical vapor deposition of (Ba,Sr)TiO3 thin film Yamamuka, M; Momose, S; Nakamura, T; Tachibana, K; Takada, H (2002) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 41(4A): 2231-2240 | |
| Microdischarge optical emission spectroscopy as a novel diagnostic tool for metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films Momose, S; Nakamura, T; Tachibana, K (2000) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 39(2A): 555-559 |
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