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書誌情報ファイル
Effects of wet oxidation/anneal on interface properties of thermally oxidized SiO2/SiC MOS system and MOSFET's
  Yano, H; Katafuchi, F; Kimoto, T; Matsunami, H (1999)
  IEEE TRANSACTIONS ON ELECTRON DEVICES, 46(3): 504-510
Effects of wet oxidation/anneal on interface properties of thermally oxidized SiO2/SiC MOS system and MOSFET's
  Yano, H; Katafuchi, F; Kimoto, T; Matsunami, H (1999-03)
  IEEE TRANSACTIONS ON ELECTRON DEVICES, 46(3): 504-510
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Effects of oxidation/anneal atmosphere on SiC MOS interface and MOSFETs
  Yano, H; Katafuchi, F; Kimoto, T; Matsunami, H (1999)
  COMPOUND SEMICONDUCTORS 1998, 162: 723-728