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書誌情報 | ファイル |
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Film precursor formation in metalorganic chemical vapor deposition of barium strontium titanate films: A study by microdischarge optical emission spectroscopy Momose, S; Nakamura, T; Tachibana, K (2002) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 41(2A): 778-783 | |
In situ infrared spectroscopic study on a titanium source in MOCVD Nakamura, T; Nishimura, T; Momose, S; Tachibana, K (2004) JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 151(10): C605-C609 | |
Effects of O-2 gas on reaction mechanisms in the chemical vapor deposition of (Ba,Sr)TiO3 thin film Yamamuka, M; Momose, S; Nakamura, T; Tachibana, K; Takada, H (2002) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 41(4A): 2231-2240 | |
Diagnosis of oxidation reactions in metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films by in situ Fourier transform infrared spectroscopy Momose, S; Sahara, R; Nakamura, T; Tachibana, K (2001) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(9B): 5501-5506 | |
Effects of gas-phase thermal decompositions of chemical vapor deposition source molecules on the deposition of (Ba, Sr)TiO3 films: A study by in situ Fourier transform infared spectroscopy Momose, S; Nakamura, T; Tachibana, K (2000) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 39(9B): 5384-5388 | |
Reaction mechanism of alkoxy derivatives of titanium diketonates as source molecules in liquid source metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films: A study by in situ infrared absorption spectroscopy Nakamura, T; Momose, S; Sahara, R; Tachibana, K (2002) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 41(11B): 6624-6627 | |
Microdischarge optical emission spectroscopy as a novel diagnostic tool for metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films Momose, S; Nakamura, T; Tachibana, K (2000) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 39(2A): 555-559 | |
Formation mechanism of strontium and titanium oxide films by metalorganic chemical vapor deposition: An isotopic labeling study using O-18(2) Nakamura, T; Momose, S; Tachibana, K (2001) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(11): 6619-6622 |